A sputtered neutral mass spectrometer with high current, low energy ion bombardment
- 1 December 1988
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 35 (3-4) , 550-554
- https://doi.org/10.1016/0168-583x(88)90329-1
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- New high current low energy ion sourceJournal of Vacuum Science & Technology B, 1987
- Performance of a new ion optics for quasisimultaneous secondary ion, secondary neutral, and residual gas mass spectrometryJournal of Vacuum Science & Technology A, 1985
- Analysis of solids by secondary ion and sputtered neutral mass spectrometryApplied Physics A, 1985
- Characterization of semiconductor materials and devices by surface analysis techniquesVacuum, 1984
- Quantitative Secondary Neutral Mass Spectrometry Analysis of Alloys and Oxide-Metal-InterfacesPublished by Springer Nature ,1983