Analysis of ionic fragments from 308 nm photoablation of polyimide
- 1 June 1989
- journal article
- Published by Springer Nature in Applied Physics A
- Vol. 48 (6) , 543-547
- https://doi.org/10.1007/bf00617855
Abstract
No abstract availableKeywords
This publication has 12 references indexed in Scilit:
- Plume temperature in the laser ablation of polyimide films measured by infrared emission spectroscopyApplied Physics B Laser and Optics, 1988
- Mass spectroscopic studies of the ArF-laser photoablation of polystyreneApplied Physics B Laser and Optics, 1987
- Direct observation of excimer-laser photoablation products from polymers by picosecond-uv-laser mass spectroscopyApplied Physics B Laser and Optics, 1987
- Ultraviolet laser ablation of polyimide filmsJournal of Applied Physics, 1987
- Velocity distribution of molecular fragments from polymethylmethacrylate irradiated with UV laser pulsesApplied Physics Letters, 1986
- Excimer laser etching of polyimideJournal of Applied Physics, 1985
- Excimer laser ablation and thermal coupling efficiency to polymer filmsJournal of Applied Physics, 1985
- Spectroscopic studies of ArF laser photoablation of PMMAApplied Physics A, 1985
- PolyimidesJournal of Polymer Science: Macromolecular Reviews, 1976
- Time-of-Flight Mass Spectrometer with Improved ResolutionReview of Scientific Instruments, 1955