A system for deposition of ferroelectric substances by radio-frequency sputtering
- 15 June 1978
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 51 (3) , 359-362
- https://doi.org/10.1016/0040-6090(78)90300-0
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- R.F. sputteringThin Solid Films, 1970