Micromechanically based integrated optic modulators and switches

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Abstract
The integration of micromachined devices into integrated optic systems offers the potential for both miniaturization and improved performance of these systems. In this paper, an electromechanical switch integrated with an optical waveguide is described that is suitable for phase and intensity modulation and thus modulation or switching functions. The electromechanical switch is fabricated using surface micromachining techniques and consists of a multilevel polyimide platform, some regions of which are suspended 2 - 3 micrometers above the waveguide surface and other region 15 micrometers above the waveguide surface. The platform is free to move in the vertical direction. Application of voltage between the platform and substrate brings the platform into intimate contact with the waveguide, thus changing the waveguide transmission characteristics. Extensions of this technique to multiple platforms in series to create multibit digital modulation is easily envisioned.

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