High-Q VHF micromechanical contour-mode disk resonators
- 11 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Nanoelectromechanical SystemsPublished by Transducer Research Foundation Inc. (TRF) ,2000
- Noise in microelectromechanical system resonatorsIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1999
- Frequency-selective MEMS for miniaturized low-power communication devicesIEEE Transactions on Microwave Theory and Techniques, 1999
- Contour Vibrations of Isotropic Circular PlatesThe Journal of the Acoustical Society of America, 1956