Diffraction-limited blazed reflection diffractive microlenses for oblique incidence fabricated by electron-beam lithography
- 1 September 1991
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 30 (25) , 3643-3649
- https://doi.org/10.1364/ao.30.003643
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 8 references indexed in Scilit:
- Reflection micro-Fresnel lenses and their use in an integrated focus sensorApplied Optics, 1989
- Planar integration of free-space optical componentsApplied Optics, 1989
- Diffractive–reflective optical interconnectsApplied Optics, 1988
- Rectangular-apertured micro-Fresnel lens arrays fabricated by electron-beam lithographyApplied Optics, 1987
- Computer-controlled electron-beam writing system for thin film micro-opticsJournal of Vacuum Science & Technology B, 1987
- Diffraction efficiencies of thin phase gratings with arbitrary grating shapeJournal of the Optical Society of America, 1978