Ion Implantation and Annealing Effects in SiO[sub 2] Layers on Silicon Studied by Optical Measurements
- 1 January 1972
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 119 (9) , 1243
- https://doi.org/10.1149/1.2404451
Abstract
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