Roughness in Nb/Cu multilayers determined by x-ray diffraction and atomic force microscopy
- 4 December 1995
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 67 (23) , 3429-3431
- https://doi.org/10.1063/1.115269
Abstract
Nb/Cu multilayers grown by molecular beam epitaxy have been studied by x-ray diffraction and atomic force microscopy. X-ray diffraction provides the average interface roughness while atomic force microscopy shows the roughness and topology of the upper surface. Comparison of both methods shows that high-angle diffraction averages over a lateral length which is in good agreement with the typical grain size.Keywords
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