Einfluß des totvolumens auf die Al2O3-CVD-Abscheidung
- 31 December 1991
- journal article
- Published by Elsevier in International Journal of Refractory Metals and Hard Materials
- Vol. 10 (4) , 203-210
- https://doi.org/10.1016/0263-4368(91)90034-l
Abstract
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