Mechanical variation of plasma potential, electron temperature and plasma density
- 1 May 1992
- journal article
- Published by IOP Publishing in Plasma Sources Science and Technology
- Vol. 1 (2) , 87-93
- https://doi.org/10.1088/0963-0252/1/2/003
Abstract
It is shown that the plasma potential and electron temperature of capacitively coupled RF plasmas, confined in a multi-dipole plasma device, can be varied by changing the position of a grounded plate located in the surface multi-dipole magnetic field.Keywords
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