Competition Between Solid Phase Epitaxy and Random Crystallization During cw Laser Annealing of Amorphous Si Films
- 1 January 1981
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Direct observation of laser-induced solid-phase epitaxial crystallization by time-resolved optical reflectivityApplied Physics Letters, 1980
- Crystallization in amorphous siliconJournal of Applied Physics, 1979
- Crystallization of amorphous silicon filmsPhysica Status Solidi (a), 1978
- Reordering of amorphous layers of Si implanted with 31P, 75As, and 11B ionsJournal of Applied Physics, 1977
- Crystallization kinetics of amorphous germaniumJournal of Applied Physics, 1977
- The crystallization of amorphous silicon filmsJournal of Non-Crystalline Solids, 1972