Comparison of disilane and hydrogen adsorption on Si(111)-7×7

• 1 September 1989
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B
• Vol. 7  (5) , 1176-1181
• https://doi.org/10.1116/1.584569

Abstract

Keywords

• COMPARISON OF DISILANE
• DISILANE AND HYDROGEN
• HYDROGEN ADSORPTION ON SI