Capacitive absolute pressure sensors with hybrid structure
- 1 January 1991
- journal article
- research article
- Published by Wiley in Electronics and Communications in Japan (Part II: Electronics)
- Vol. 74 (4) , 67-75
- https://doi.org/10.1002/ecjb.4420740408
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- CAD tools in mechanical sensor designSensors and Actuators, 1989
- Capacitive pressure transducers with integrated circuitsSensors and Actuators, 1983