Prototype miniature blood gas analyser fabricated on a silicon wafer
- 1 June 1988
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 14 (2) , 101-107
- https://doi.org/10.1016/0250-6874(88)80057-x
Abstract
No abstract availableKeywords
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- Field Assisted Glass-Metal SealingJournal of Applied Physics, 1969