Measurement of the Young's modulus for structural characterization of amorphous Si:C:N:H-films
- 1 January 1989
- journal article
- research article
- Published by Springer Nature in Analytical and Bioanalytical Chemistry
- Vol. 333 (4) , 313-314
- https://doi.org/10.1007/bf00572312
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Gas evolution studies for structural characterization of hexamethyldisilazane-based a-Si:C:N:H filmsJournal of Applied Physics, 1987
- Elastic Properties of GlassesPhysical Review Letters, 1985
- Ultramicroindentation apparatus for the mechanical characterization of thin filmsJournal of Applied Physics, 1984