Effect of Structure on the Piezoresistive Properties of Thin Metal Films

• 1 July 1969
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 6  (4) , 706-710
• https://doi.org/10.1116/1.1315736

Abstract

Keywords

• THIN METAL FILMS
• PIEZORESISTIVE PROPERTIES
• STRUCTURE
• PROPERTIES OF THIN