Dry Etching of GaAs , AlGaAs , and GaSb in Hydrochlorofluorocarbon Mixtures

• 1 December 1990
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 137  (12) , 3892-3899
• https://doi.org/10.1149/1.2086323

Abstract