Analytical static modelling and optimization of electrostatic micropumps
- 1 September 1997
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 7 (3) , 183-185
- https://doi.org/10.1088/0960-1317/7/3/027
Abstract
Having developed a mechanical law with a simple elementary model of membrane deflection, we demonstrate the static instability of such a system under electrostatic actuation and provide an analytical solution for the membrane position. This allows us to highlight the sticking effect and the hysteresis phenomenon of the pump strike volume due to the nonlinearity of such excitation. We determine a parameter optimization procedure for the dimensions of the electrostatic actuated membrane in order to achieve maximum volume displacement.Keywords
This publication has 1 reference indexed in Scilit:
- Static response of miniature capacitive pressure sensors with square or rectangular silicon diaphragmRevue de Physique Appliquée, 1987