Preparation of Barium Titanate Thin Film on Titanium-Deposited Glass Substrate by Hydrothermal-Electrochemical Method

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Abstract
Well-crystallized polycrystalline barium titanate thin films have been prepared at sufficiently low temperatures by the hydrothermal-electrochemical reaction on titanium-deposited glass substrates. The reaction was carried out in 0.1-0.5N Ba(OH)2 solutions at temperatures of 100°-200°C and under saturated vapor pressures, using a titanium-deposited glass substrate for anode and a Pt plate for cathode and applying an electric current galvanostatically up to 18mA/cm2. The BaTiO3 film was lustrous and dense. The thickness of the film estimated from the weight change increased from 70 to 300nm with treatment time from 10 to 60min at 200°C in 0.5N Ba(OH)2 solution with the current density of 15mA/cm2. The adhesion of the BaTiO3 film to the glass substrate was so strong that no exfoliation was observed. Similar BaTiO3 thin films with thickness less than 70nm were formed under hydrothermal conditions without electricity.