Artifacts observed during Auger profiling of Ta, Ti, and W metals, nitrides and oxynitrides
- 1 April 1982
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 20 (4) , 968-970
- https://doi.org/10.1116/1.571655
Abstract
Studies of CKVV Auger spectra indicate carbide formation in certain metals and compounds resulting from ion beam bombardment of contaminated (air exposed) surfaces. Carbide buildup on W, Ta, and Ti surfaces after ’’static’’ sputter cleaning in an AES system, occurred in the presence of small partial pressures of CH4 generated from the speciman chamber walls and ion pump well. This carbide buildup was greatly accelerated by electron beam irradiation.Keywords
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