Double 15-nm-wide metal gates 10 nm apart and 70 nm thick on GaAs

• 1 November 1990
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B
• Vol. 8  (6) , 1919-1922
• https://doi.org/10.1116/1.584874

Abstract

Keywords

• GAAS
• METAL GATES
• NM THICK
• NM WIDE METAL