In situ study of epitaxial CoSi2/Si(111) by ballistic-electron-emission microscopy
- 1 July 1994
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 12 (4) , 2629-2633
- https://doi.org/10.1116/1.587222