Abstract
Deep levels in a very thin active layer of less than 0.1 µm, such as used for normally-off GaAs MESFETs, were succesfully detected by monitoring photo-induced drain current variation as a function of light wavelength. Four current peaks were observed at 2330, 1750, 1410 and 910 nm wavelengths. Illumination-induced change in the surface depletion layer width is supposed to play an important role in the current variation.

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