High-resolution sampling SEM for quantitative investigations of semiconductor devices and integrated circuits

1 April 1978

journal article
Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices

Vol. 25 (4) , 431-434
https://doi.org/10.1109/T-ED.1978.19103

Abstract

A scanning microscope has been interfaced with sampling circuitry to record high-speed voltage waveforms at internal points in devices. The system is capable of resolving rise times of 100 ps and voltage steps with an uncertainty of less than 10 mV. Results demonstrate the operation of the 4-GHz sampling SEM.

Keywords

UNCERTAINTY
CIRCUITS
RESOLUTION
MICROSCOPE
WAVEFORMS
CIRCUITRY
GHZ
SAMPLING SEM