Scratch Test for Measuring Adherence of Thin Films to Oxide Substrates
- 1 October 1964
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 35 (10) , 1324-1326
- https://doi.org/10.1063/1.1718736
Abstract
The adherence of films on oxide substrates is measured by a scratch‐test technique using a commercially available hardness tester. Test results viewed by transmitted light on transparent substrates show (1) how contamination can cause failure of potentially‐adherent film and (2) how a potential adherence (on a well‐cleaned substrate) is related to the free energy of formation of the metal oxide.Keywords
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