A capacitance displacement sensor with elastic diaphragm
- 1 March 1992
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 63 (3) , 2051-2053
- https://doi.org/10.1063/1.1143165
Abstract
We have developed a capacitance displacement sensor based on the elastic deformation of a 150 μm thick diaphragm made up of Cu0.98Be0.02. Displacements up to 50 μm can be detected. The resolution is about 0.1 nm. The time dependence of the dilatation of a relaxor‐ferroelectric (Sr0.61Ba0.39)Nb2O6 single crystal after removing an electric field is investigated using this sensor.Keywords
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