Annealing of Electron Bombardment Damage in Silicon Crystals

Abstract
Silicon crystals were bombarded at room temperature with electrons of 700 kev from a Van de Graaff accelerator. The annealing of the bombardment damage was studied between 200°C and 400°C by observing the recovery of the minority-carrier lifetime. The annealing was found to proceed with an activation energy of 1.3 ev. This is interpreted as being the activation energy associated with the lattice jump frequency.