Reactive sputtering of superconducting thin films
- 1 January 1989
- proceedings article
- Published by AIP Publishing in AIP Conference Proceedings
- Vol. 182 (1) , 2-7
- https://doi.org/10.1063/1.37970
Abstract
We report a simple, versatile method for fabrication of superconducting thin films of Y1Ba2 Cu 3O7−x using reactive RF sputtering from three targets in vacuum and a subsequent anneal in oxygen. The structure and composition of the films were verified using Rutherford backscattering spectroscopy and x‐ray diffraction studies. Measurement of resistivity and susceptibility vs. temperature established the superconducting transition temperatures for the films. Comparison of the susceptibility and resistance transitions demonstrates heterogeneity in the superconducting character of the films.Keywords
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