Depth scale calibration during sputter removal of multilayer systems by SNMS
- 1 January 1989
- journal article
- Published by Springer Nature in Analytical and Bioanalytical Chemistry
- Vol. 333 (4) , 470-473
- https://doi.org/10.1007/bf00572355
Abstract
No abstract availableKeywords
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- ESCA study of the passive layer on Sn-Ni alloyJournal of Vacuum Science and Technology, 1977
- Sputtering Yields of Metals for Ar+ and Ne+ Ions with Energies from 50 to 600 evJournal of Applied Physics, 1961