Etching of Gallium Arsenide with Nitric Acid

• 1 January 1964
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 111  (9) , 1102-1104
• https://doi.org/10.1149/1.2426328

Abstract

Keywords

• NITRIC ACID
• ETCHING OF GALLIUM
• GALLIUM ARSENIDE WITH NITRIC