Use of a Pulse Laser Technique in Failure Analysis

• 1 April 1973
• conference paper
• Published by Institute of Electrical and Electronics Engineers (IEEE)
• No. 07350791,p. 124-126
• https://doi.org/10.1109/irps.1973.362582

Abstract

Keywords

• OPTICAL PULSES
• FAILURE ANALYSIS
• LASER BEAM CUTTING
• MONITORING
• MICROSCOPY
• GAS LASERS
• LASER BEAMS
• POWER LASERS
• SILICON