A theoretical study of collision induced desorption spectroscopy from Si(111) surfaces

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Abstract
A theoretical classical stochastic trajectory study of collision induced desorption spectroscopy (CIDS) is presented in this paper. These theoretical results suggest that CIDS might provide useful experimental information on the binding energy and binding sites for adsorbates on surfaces. This information is obtained from analysis of the kinetic energy and angular distributions of both the collider atom and the desorbed adsorbate. Simulations of CIDS are reported for Xe colliding beams of 1 to 5 eV with monoatomic adsorbates on Si(111).