Radio-frequency-magnetron-sputtered CdS/CdTe solar cells on soda-lime glass

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Abstract
We report the fabrication of an 11.6% efficient, polycrystalline thin‐film CdS/CdTe solar cell in which both semiconductor layers were deposited by planar‐magnetron‐radio‐frequency sputtering at 380 °C on commercially available soda‐lime float‐glass substrates coated with SnO2:F. We show that the magnetron magnetic field is critical to obtaining high cell efficiency. Much stronger photoluminescence and higher electrical conductivity are found in films and cells grown with unbalanced‐field magnetrons. The magnetic field dependence is interpreted as arising from the enhanced electron and ion bombardment of the film growth interface when unbalanced magnetrons are used.

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