Patterned, photon-driven cryoetching of GaAs and AlGaAs

• 1 January 1995
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 13  (1) , 43-54
• https://doi.org/10.1116/1.587983

Abstract