Diagnostics and Modeling of N 2 O RF Glow Discharges

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Abstract
In situ diagnostic measurements and reactor modeling have been used to study radio‐frequency (RF) discharges. Gas‐phase rotational temperatures and and concentrations were estimated from in situ Fourier transform infrared (FTIR) absorption measurements; electron densities were determined using a Langmuir probe. Measurements were conducted at 500 mtorr, flow rates from 20 to 60 sccm, and discharge powers of 5, 10, and 20W at 13.56 MHz. The rotational temperatures and electron densities were used as inputs to a reactor model. The model includes reactions among five molecular ( , , , , and ) and three atomic [N, O(3P), O(1D)] species. Calculated values of and concentrations were in good agreement with those derived from FTIR data. In addition to providing estimates of the concentration of species not detected with FTIR, the modeling permitted identification of important reaction mechanisms for the formation and destruction of species. Model results revealed and to be the most abundant products of plasma decomposition; and O(3P) were present at 1 to 7 mole percent (m/o). , O(1D), and N were present at much lower concentrations (109 to 1011 cm−3), but played an important role in the reactor chemistry.

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