Infrared thermopile sensors with high sensitivity and very low temperature coefficient
- 30 April 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 47 (1-3) , 422-427
- https://doi.org/10.1016/0924-4247(94)00934-a
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Polysilicon as a material for microsensor applicationsSensors and Actuators A: Physical, 1992
- High-sensitivity radiation thermopiles made of BiSbTe filmsSensors and Actuators A: Physical, 1991