Single source molecular precursors for the deposition of III/VI chalcogenide semiconductors by MOCVD and related techniques
- 12 October 2000
- journal article
- perspective
- Published by Royal Society of Chemistry (RSC) in J. Chem. Soc., Dalton Trans.
- No. 24,p. 4479-4486
- https://doi.org/10.1039/b004454g
Abstract
There has been a renaissance of interest in Group III/VI (13/16) semiconductor materials because of their potential for use in various electronics applications. The synthesis and characterization of metalorganic and organometallic compounds with Group 16 ligands have as a consequence become topical. Such molecules are used as precursors and contain direct bonds between the metal and the chalcogen. A close interplay between the development of new chemistry and the deposition of novel materials has therefore developed.Keywords
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