Plasma fluorination of organosilicon polymeric films for gas separation applications

• 19 March 1997
• journal article
• Published by Elsevier in Journal of Membrane Science
• Vol. 125  (2) , 319-329
• https://doi.org/10.1016/s0376-7388(96)00254-2

Abstract

Keywords

• PLASMA MODIFICATION
• FLUORINATION
• GAS SEPARATION
• POLYTRIMETHYLSILYLPROPYNE
• POLYVINYLTRIMETHYLSILANE
• X-RAY PHOTOELECTRON SPECTROSCOPY
• NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY