Electrochemical etch-stop control for silicon structures containing electronic components
- 1 May 1988
- journal article
- Published by Springer Nature in Journal of Applied Electrochemistry
- Vol. 18 (3) , 463-468
- https://doi.org/10.1007/bf01093764
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- An electrochemical P-N junction etch-stop for the formation of silicon microstructuresIEEE Electron Device Letters, 1981
- A batch-fabricated silicon accelerometerIEEE Transactions on Electron Devices, 1979
- Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensorsIEEE Transactions on Electron Devices, 1979
- Sodium Hydroxide Solution Shows Selective Etching of Boron‐Doped SiliconJournal of the Electrochemical Society, 1979