Laser-assisted etching of ferroelectric ceramics for the reticulation of IR detector arrays

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Abstract
Focal plane arrays using ferroelectric ceramics have shown considerable success for ambient temperature IR imaging. To realise their full potential, however, the arrays must be reticulated, ie. the individual detector elements must be physically separated. In the research reported here, the use of focused argon-ion laser radiation to etch lead-compound ferroelectric ceramics in aqueous KOH is demonstrated. The experimental conditions required to laser-etch the desired structures for detector elements are discussed. Finally, the use of a reflective metal layer as an etch stop is assessed and laser-reticulated elements at 1 00 microns pitch are shown.

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