Spatial filtering for depth of focus and resolution enhancement in optical lithography

• 1 November 1991
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 9  (6) , 3113-3116
• https://doi.org/10.1116/1.585322

Abstract

Keywords

• SPATIAL FILTERING
• DEPTH OF FOCUS