Modeling the electromagnetic excitation of a compact ECR ion/free radical sourcea)
- 1 May 1994
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 65 (5) , 1761-1765
- https://doi.org/10.1063/1.1144874
Abstract
The electromagnetic excitation of a discharge inside a microwave plasma source has been numerically modeled in the time domain. The source is a cylindrical, single-mode microwave-excited cavity. The time-varying electromagnetic fields inside the resonant cavity, both inside and outside the discharge region, are obtained by applying a finite-difference time-domain method to solve Maxwell’s equations. The electromagnetic properties of the discharge load are described using a conductivity model. The spatial electric field patterns, natural frequencies, stored energy, and quality factor of a plasma-loaded, microwave-resonant cavity are simulated. Additionally, the simulated results for a simplified plasma source structure are compared to a known analytical solution to verify the simulation technique.Keywords
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