X-Ray Microscopy: Recent Developments And Practical Applications
- 29 March 1983
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 368, 2-9
- https://doi.org/10.1117/12.934316
Abstract
X-ray microscopy using soft X-rays progressed successfully during past years. This paper discusses the atomic cross sections, the photoelectric absorption and the radiation damage for soft X-rays. Resulsts of contact microradiography are summarized. X-ray optics, which can be used for microscopy are zone plates, grazing incidence mirrors and normal incidence multi-layer mirrors, yet this has only been shown in practice with high resolution for zone plates. Details of the "Gottingen X-ray microscope" are given and a photographic image, showing 50 nm resolution, is shown. The future work of several groups is concentrated on the development of scanning X-ray microscopes.Keywords
This publication has 0 references indexed in Scilit: