Erbium luminescence from hydrogenated amorphous silicon-erbium prepared by cosputtering
- 27 January 1997
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 70 (4) , 511-513
- https://doi.org/10.1063/1.118196
Abstract
Hydrogenated amorphous silicon with small amounts of erbium (Er/Si concentration similar to 5 at.%) was prepared by radio frequency sputtering from a Si target partially covered by tiny metallic Er chunks. Four sets of samples were studied: nonintentionally contaminated hydrogenated and nonhydrogenated amorphous silicon-erbium (a-SiEr:H and a-SiEr); nitrogen doped a-SiEr(N):H and oxygen contaminated a-SiEr(O):H. Samples from the first two sets present only faint 1.54 mu m photoluminescence characteristic from Er3+ ions even at 77 K. Samples from the other sets show this luminescence at 77 K as deposited, without any further annealing step. Thermal annealing up to 500 degrees C increases the photoluminescence intensity, and room temperature emissions become strong enough to be easily detected. These results indicate that in an amorphous silicon environment the chemical neighborhood of the Er3+ ions is crucial for efficient 1.54 mu m emission. Raman scattering from both as-deposited and annealed samples showed that network disorder relaxation by annealing is not determinant for efficient Er3+ luminescence. (C) 1997 American Institute of PhysicsKeywords
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