Barrier effect of selective chemical vapor deposited tungsten films

• 1 September 1986
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B
• Vol. 4  (5) , 1175-1179
• https://doi.org/10.1116/1.583478

Abstract

Keywords

• LEAKAGE CURRENT
• ELECTRIC CONDUCTIVITY
• HEAT TREATMENT
• PHYSICAL PROPERTIES
• CONTACT RESISTANCE