Advanced fabrication technologies of integrated-type structure for a-Si solar cells

• 30 November 1997
• journal article
• Published by Elsevier in Solar Energy Materials and Solar Cells
• Vol. 48  (1-4) , 373-381
• https://doi.org/10.1016/s0927-0248(97)00166-9

Abstract

Keywords

• AMORPHOUS SILICON
• SOLAR CELLS
• PLASMA CVM
• PATTERNING
• MULTIWIRE