Piezoresistive properties of polycrystalline and crystalline silicon films
- 1 March 1987
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 11 (2) , 145-155
- https://doi.org/10.1016/0250-6874(87)80013-6
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
- Piezoresistance in polysiliconElectronics Letters, 1984
- Growth of monocrystalline silicon islands on insulating substratesThin Solid Films, 1984
- Polycrystalline silicon-on-metal strain gauge transducersIEEE Transactions on Electron Devices, 1983
- Low-cost pressure/force transducer with silicon thin film strain gaugesSensors and Actuators, 1983
- A graphical representation of the piezoresistance coefficients in siliconIEEE Transactions on Electron Devices, 1982
- Modeling and optimization of monolithic polycrystalline silicon resistorsIEEE Transactions on Electron Devices, 1981
- Piezoresistive properties of polycrystalline siliconJournal of Applied Physics, 1976
- The electrical properties of polycrystalline silicon filmsJournal of Applied Physics, 1975