New Methods of Vapour Phase Epitaxial Growth of GaAs

• 1 January 1976
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 15  (1) , 11-17
• https://doi.org/10.1143/jjap.15.11

Abstract

Keywords

• FLOW RATE
• REACTION MECHANISM
• ARSENIC
• EPITAXIAL GROWTH