Sputtering investigations with the Monte Carlo program TRIM SP
- 1 March 1984
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 2 (1-3) , 550-554
- https://doi.org/10.1016/0168-583x(84)90264-7
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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