Spectroscopic Properties of WO3 Thin Films: Polarized FT-IR/ATR, X-Ray Diffraction, and Electronic Absorption
- 1 June 1994
- journal article
- Published by SAGE Publications in Applied Spectroscopy
- Vol. 48 (6) , 674-677
- https://doi.org/10.1366/000370294774368992
Abstract
The Fourier transform infrared/micro-attenuated total reflectance (FT-IR/mATR), X-ray diffraction (XRD), and electronic absorption properties of thin tungsten oxide films are characterized. Thin films of tungsten oxide (100–500 Å) deposited on SiO2 exhibit a different orientation or structure than thicker films. A p-polarized longitudinal optical (LO) mode at 970 cm−1 occurs in all ATR spectra of WO3 thin films and is one of the strongest IR bands in the spectra. The spectroscopic properties of tungsten oxide films are characterized as a function of substrate and heat treatment.Keywords
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